Towards High Resolution in TEM and STEM: What are the Limitations and Achievements

نویسندگان

  • Max. Haider
  • Stephan Uhlemann
  • Peter Hartel
  • Heiko Müller
چکیده

The resolving power of a microscope is one of the most important parameters especially when talking about modern high resolution instruments like TEM or STEM. In contrary, the attainable resolution depends on the resolving power of the microscope and the object and it can only be measured when imaging a certain object detail. Therefore, resolving power in this context means the object independent capability of an instrument to image a certain minimal size of an ideal object detail only limited by instrumental parameters. The resolution is the minimal detail of a certain object which can be resolved by an electron microscope.

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تاریخ انتشار 2014